E.L. Pankratov and E.A. Bulaeva
Nizhny Novgorod State University, Russia

In this paper as a development of recently introduced analytical approach for estimation of temporal cha-racteristics of mass and heat transport we present analysis of diffusion depth of dopant in a material with time varying diffusion coefficient. It has been shown, that changing of time dependence of diffusion coeffi-cient gives a possibility to accelerate or decelerate diffusion process. In this situation it is an actual ques-tion is control of diffusion depth during manufacturing p-n-junctions. The controlling gives a possibility to obtain required depth of the junctions, but not larger or smaller.

Time varying diffusion coefficient; diffusion depth of dopant; control of diffusion dept